JPS6330846U - - Google Patents

Info

Publication number
JPS6330846U
JPS6330846U JP1986125564U JP12556486U JPS6330846U JP S6330846 U JPS6330846 U JP S6330846U JP 1986125564 U JP1986125564 U JP 1986125564U JP 12556486 U JP12556486 U JP 12556486U JP S6330846 U JPS6330846 U JP S6330846U
Authority
JP
Japan
Prior art keywords
flat surface
pellicle
attaching
utility
inner peripheral
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1986125564U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0419543Y2 (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986125564U priority Critical patent/JPH0419543Y2/ja
Publication of JPS6330846U publication Critical patent/JPS6330846U/ja
Application granted granted Critical
Publication of JPH0419543Y2 publication Critical patent/JPH0419543Y2/ja
Expired legal-status Critical Current

Links

JP1986125564U 1986-08-18 1986-08-18 Expired JPH0419543Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986125564U JPH0419543Y2 (en]) 1986-08-18 1986-08-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986125564U JPH0419543Y2 (en]) 1986-08-18 1986-08-18

Publications (2)

Publication Number Publication Date
JPS6330846U true JPS6330846U (en]) 1988-02-29
JPH0419543Y2 JPH0419543Y2 (en]) 1992-05-01

Family

ID=31018569

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986125564U Expired JPH0419543Y2 (en]) 1986-08-18 1986-08-18

Country Status (1)

Country Link
JP (1) JPH0419543Y2 (en])

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63298245A (ja) * 1987-05-28 1988-12-06 Mitsui Petrochem Ind Ltd ペリクルの製造方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5655837U (en]) * 1979-10-02 1981-05-15

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5655837U (en]) * 1979-10-02 1981-05-15

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63298245A (ja) * 1987-05-28 1988-12-06 Mitsui Petrochem Ind Ltd ペリクルの製造方法

Also Published As

Publication number Publication date
JPH0419543Y2 (en]) 1992-05-01

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